By Gary E. McGuire,Yale E. Strausser
engineers operating with compound semiconductor fabrics and units who
are now not characterization experts. fabrics and procedures usually used in
R&D and within the fabrication of GaAs, GaA1As, InP and HgCdTe established devices
provide examples of universal analytical difficulties. The publication discusses a variety
of characterization strategies to supply perception into how each one individually,
or together, should be utilized in fixing difficulties linked to these
materials. The e-book can help within the choice and alertness of the appropriate
analytical strategies by means of its assurance of all phases of fabrics or device
processing: substrate practise, epitaxial progress, dielectric movie deposition,
contact formation and dopant introduction.
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Extra resources for Characterization in Compound Semiconductor Processing
Characterization in Compound Semiconductor Processing by Gary E. McGuire,Yale E. Strausser